Low loss suspended membrane on low resistivity silicon and its applications to millimetre-wave passive circuits

Engineering

• Millimeter Wave 100%
• Passive Networks 100%
• Resonator 33%
• Silicon Technology 33%
• Demonstrates 16%
• Filtration 16%
• Frequency Response 16%
• Q Factor 16%
• Silicon Wafer 16%
• Operating Frequency 16%
• Insertion Loss 16%
• Electric Lines 16%
• Silicon Substrate 16%
• Return Loss 16%
• Fractional Bandwidth 16%
• Passbands 16%
• Order Bandpass Filter 16%
• Metal Layer 16%
• Front Side 16%
• Side Structure 16%