Linearity measurement of MEMS gyroscope vibration system based on videometrics

A balanced vibration of driving module excited by electrostatic driving signal is the working base for MEMS gyroscope. In order to analyze the linearity of the vibration system, a method based on computer vision is applied to detect the vibration process, which works with the help of high-speed vidicon to acquire the video images of vibration displacement of gyroscope driving module, under the AM (amplitude modulation) driving voltage signal with inherent frequency. By means of image processing, target identifying and motion parameter extracting from the video images, the vibration of the gyroscope with time variation could be obtained. Finally, linearity of the vibration system could be analyzed by focusing on the displacement of vibration responding to the amplitude of driving voltage signal.