TY - GEN
T1 - Lengthwise detection of high linearity micromachined gyroscope
AU - Yao, Fenglin
AU - Gao, Shiqiao
AU - Liang, Xinjian
PY - 2011
Y1 - 2011
N2 - This paper introduces the basic working principle of capacitive micromachined gyroscope. A novel differential lengthwise capacitance comb detection structure is put forward. And it also analyzes the linearity of the differential lengthwise capacitive comb detection structure compares to the transversal detection. By measuring the scale factor, it verifies the high linearity of lengthwise differential capacitive detection structure. The linearity insures the linearity of conversing section of the detect system's displacement and the capacitive variation. And this will greatly improve the linearity and stability of micromachined gyroscope.
AB - This paper introduces the basic working principle of capacitive micromachined gyroscope. A novel differential lengthwise capacitance comb detection structure is put forward. And it also analyzes the linearity of the differential lengthwise capacitive comb detection structure compares to the transversal detection. By measuring the scale factor, it verifies the high linearity of lengthwise differential capacitive detection structure. The linearity insures the linearity of conversing section of the detect system's displacement and the capacitive variation. And this will greatly improve the linearity and stability of micromachined gyroscope.
KW - Lengthwise detection
KW - Linearity
KW - Micromachined gyroscope
UR - http://www.scopus.com/inward/record.url?scp=79957876516&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.230-232.529
DO - 10.4028/www.scientific.net/AMR.230-232.529
M3 - Conference contribution
AN - SCOPUS:79957876516
SN - 9783037851333
T3 - Advanced Materials Research
SP - 529
EP - 533
BT - Frontiers of Manufacturing Science and Measuring Technology
T2 - 2011 International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2011
Y2 - 23 June 2011 through 24 June 2011
ER -