摘要
This paper introduces the basic working principle of capacitive micromachined gyroscope. A novel differential lengthwise capacitance comb detection structure is put forward. And it also analyzes the linearity of the differential lengthwise capacitive comb detection structure compares to the transversal detection. By measuring the scale factor, it verifies the high linearity of lengthwise differential capacitive detection structure. The linearity insures the linearity of conversing section of the detect system's displacement and the capacitive variation. And this will greatly improve the linearity and stability of micromachined gyroscope.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | Frontiers of Manufacturing Science and Measuring Technology |
| 页 | 529-533 |
| 页数 | 5 |
| DOI | |
| 出版状态 | 已出版 - 2011 |
| 活动 | 2011 International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2011 - Chongqing, 中国 期限: 23 6月 2011 → 24 6月 2011 |
出版系列
| 姓名 | Advanced Materials Research |
|---|---|
| 卷 | 230-232 |
| ISSN（印刷版） | 1022-6680 |
会议
| 会议 | 2011 International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2011 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Chongqing |
| 时期 | 23/06/11 → 24/06/11 |
指纹
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Yao, F., Gao, S., & Liang, X. (2011). Lengthwise detection of high linearity micromachined gyroscope. 在 Frontiers of Manufacturing Science and Measuring Technology (页码 529-533). (Advanced Materials Research; 卷 230-232). https://doi.org/10.4028/www.scientific.net/AMR.230-232.529