Laser differential confocal radius measurement

Weiqian Zhao*, Ruoduan Sun, Lirong Qiu, Dingguo Sha

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

79 引用 (Scopus)

摘要

A new laser differential confocal radius measurement (DCRM) is proposed for high precision measurement of radius. Based on the property of an axial intensity curve that the absolute zero precisely corresponds to the focus of the objective in a differential confocal system (DCS), DCRM uses the zero point of the DCS axial intensity curve to precisely identify the cat'seye and confocal positions of the test lens, and measures the accurate distance between the two positions to achieve the high-precision measurement of radius of curvature (ROC). In comparison with the existing measurement methods, DCRM proposed has a high measurement precision, a strong environmental anti-interference capability and a low cost. The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5ppm.

源语言英语
页(从-至)2345-2360
页数16
期刊Optics Express
18
3
DOI
出版状态已出版 - 1 2月 2010

指纹

探究 'Laser differential confocal radius measurement' 的科研主题。它们共同构成独一无二的指纹。

引用此