Investigation of optical properties of aluminium doped zinc oxide thin films deposited by magnetron sputtering

J. H. Gu, T. Zhang, Z. Y. Zhong, C. Y. Yang, J. Hou

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Aluminium doped zinc oxide (AZO) thin films were prepared by magnetron-sputtering. The optical and structural properties of the films were investigated by optical transmission spectra and X-ray diffraction (XRD) measurements, respectively. The results indicate that the AZO films have hexagonal wurtzite structure with highly c-axis preferred orientation. The optical and structural properties of the films are observed to be subjected to the argon pressure. The AZO film prepared at the argon pressure of 0.5 Pa exhibits the largest crystallite size and the highest average visible transmittance. Also, the refractive index and optical energy-gap of the films were determined by optical characterization methods. The dispersion behavior of the refractive index was studied using the Sellmeier's dispersion model.

源语言英语
主期刊名Advanced Research in Material Science and Mechanical Engineering
259-262
页数4
DOI
出版状态已出版 - 2014
已对外发布
活动2013 2nd International Conference on Mechanics and Control Engineering, ICMCE 2013 - Beijing, 中国
期限: 1 9月 20132 9月 2013

出版系列

姓名Applied Mechanics and Materials
446-447
ISSN(印刷版)1660-9336
ISSN(电子版)1662-7482

会议

会议2013 2nd International Conference on Mechanics and Control Engineering, ICMCE 2013
国家/地区中国
Beijing
时期1/09/132/09/13

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