Interferometric measurement of high-order aspheric surface parameter errors based on a virtual-real combination iterative algorithm

Qun Hao, Xin Tao, Yao Hu*, Tengfei Li, Weiqian Zhao

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

13 引用 (Scopus)

摘要

Aspheric surface parameters, including vertex radius of curvature, conic constant, and high-order aspheric coefficients, decide the optical properties of aspheric surfaces. The measurement of aspheric surface parameter errors (SPEs) is a substantial issue for the fabrication of aspheric surfaces. Interferometry is a mature high-accuracy method in aspheric surface figure error measurement, but challenges still exist in the measurement of SPEs for high-order aspheric surfaces or convex aspheric surfaces. We propose an interferometric measurement method for high-order aspheric SPEs based on a virtual-real combination iterative algorithm (VRCIA). We also propose a recommended measurement system including a partial compensation interferometer to obtain the partial compensated wavefront and a laser differential confocal system to obtain the best compensation distance for calculating SPEs through the VRCIA. A high-order convex aspheric surface is measured to demonstrate the feasibility of the method. The relative accuracy of vertex radius of curvature error, conic constant error and fourth-order aspheric coefficient error can reach 0.025%, 0.095% and 3.02%, respectively.

源语言英语
页(从-至)27014-27030
页数17
期刊Optics Express
29
17
DOI
出版状态已出版 - 16 8月 2021

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