TY - GEN
T1 - Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors
AU - Tseng, Victor Farm Guoo
AU - Wu, Lei
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/8/5
Y1 - 2015/8/5
N2 - This paper serves to demonstrate inductive eddy current based sensing as a promising piston position and tilt angle sensing mechanism for large vertical displacement micromirrors that exhibit piston scan ranges above 100 μm. The sensor consists of two microfabricated coils packaged under the mirror plate, and supports both amplitude and frequency detection modes. Amplitude detection is achieved by sensing the coupling change between the coils when the mirror plate moves, and a piston sensing range of 1 mm with 306 nm resolution (or 130 μm with 20 nm resolution) could be obtained. Frequency detection is achieved by sensing the inductance change of both coils, and can simultaneously monitor piston position and tilt angle over a 500 μm range.
AB - This paper serves to demonstrate inductive eddy current based sensing as a promising piston position and tilt angle sensing mechanism for large vertical displacement micromirrors that exhibit piston scan ranges above 100 μm. The sensor consists of two microfabricated coils packaged under the mirror plate, and supports both amplitude and frequency detection modes. Amplitude detection is achieved by sensing the coupling change between the coils when the mirror plate moves, and a piston sensing range of 1 mm with 306 nm resolution (or 130 μm with 20 nm resolution) could be obtained. Frequency detection is achieved by sensing the inductance change of both coils, and can simultaneously monitor piston position and tilt angle over a 500 μm range.
KW - Inductive position sensing
KW - eddy currents
KW - mutual coupling
KW - piston scanning micromirror
KW - sensing coil
UR - http://www.scopus.com/inward/record.url?scp=84955514794&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2015.7180890
DO - 10.1109/TRANSDUCERS.2015.7180890
M3 - Conference contribution
AN - SCOPUS:84955514794
T3 - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
SP - 176
EP - 179
BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Y2 - 21 June 2015 through 25 June 2015
ER -