TY - JOUR
T1 - Hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator
AU - Liu, Wenjing
AU - Liao, Wenjun
AU - Jia, Kemiao
AU - Zhu, Yiping
AU - Xie, Huikai
AU - Wang, Baoping
AU - Tang, Yongming
PY - 2014/1/2
Y1 - 2014/1/2
N2 - This paper presents hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of piezoelectric actuator will be reduced for the reason of hysteresis behavior of piezoelectric device. To compensate the hysteresis behavior of the actuator, the properties should be researched and tested at first. The paper report the hysteresis behavior of micromirror with TLSF piezoelectric actuator under fixed frequency driving is stable with respect to the changes of the time and amplitude of driving voltage without considering the failure effect.
AB - This paper presents hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of piezoelectric actuator will be reduced for the reason of hysteresis behavior of piezoelectric device. To compensate the hysteresis behavior of the actuator, the properties should be researched and tested at first. The paper report the hysteresis behavior of micromirror with TLSF piezoelectric actuator under fixed frequency driving is stable with respect to the changes of the time and amplitude of driving voltage without considering the failure effect.
KW - Hysteresis properties
KW - lateral shift free (LSF)
KW - lead zirconate titanate (PZT)
KW - micromirror
KW - piezoelectric actuator
KW - tip-tilt-pison (TTP)
UR - http://www.scopus.com/inward/record.url?scp=84894734915&partnerID=8YFLogxK
U2 - 10.1080/10584587.2014.873276
DO - 10.1080/10584587.2014.873276
M3 - Article
AN - SCOPUS:84894734915
SN - 1058-4587
VL - 150
SP - 14
EP - 22
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
IS - 1
ER -