High Precision Machining of Micro-pyramid Array of Electroless Ni-P Plating Based on Relative Tool Sharpness Effect

Qian Yu, Tianfeng Zhou, Yao Hu*, Jia Zhou, Xiaoqiang Yao, Danmei Zhang, Qun Hao, Xibin Wang

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Relative tool sharpness (RTS) is identified as the ratio of undeformed chip thickness to tool cutting edge radius, which plays an important role in affecting the micro- or nano-machining process. This paper studied the effect of RTS on the high precision micro-pyramid array machining of electroless Ni-P plating. A V-shaped diamond tool was adopted, the cutting edge radius of which was measured by a laser scanning confocal microscope (LSCM). The effects of cutting speed and RTS on the machining process were investigated by finite element simulation. A multi-step cutting method was applied for the machining of the micro-pyramid array. Results showed that the optimal machined surface roughness is obtained at a cutting speed of 60 m/min and an RTS of 0.4. Compared with the theoretical profile, the relative errors of the pitch, depth, and included angle of the micro-pyramid array can be controlled below 0.24%, 0.80%, and 2.50%, respectively. The PV value of the machined micro-pyramid array is under 200 nm.

源语言英语
主期刊名Proceedings of the 7th International Conference on Nanomanufacturing, nanoMan2021
编辑Shuming Yang, Xichun Luo, Yongda Yan, Zhuangde Jiang
出版商Springer Science and Business Media Deutschland GmbH
27-32
页数6
ISBN(印刷版)9789811919176
DOI
出版状态已出版 - 2022
活动7th International Conference on Nanomanufacturing, nanoMan2021 - Xi'an, 中国
期限: 17 11月 202119 11月 2021

出版系列

姓名Smart Innovation, Systems and Technologies
296 SIST
ISSN(印刷版)2190-3018
ISSN(电子版)2190-3026

会议

会议7th International Conference on Nanomanufacturing, nanoMan2021
国家/地区中国
Xi'an
时期17/11/2119/11/21

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