High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability

K. Jia*, S. Pal, H. Xie

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

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Engineering