摘要
This paper investigates the microfabrication process of graphene in developing high frequency, particularly millimeter-wave and terahertz, electronic devices. We consider graphene production, transfer, fabrication and electrical characterization. Preliminary results reveal key insights including the benefit of polymer removal in transferring graphene to substrates as well as identifying Ar ion beam etching as being effective in patterning graphene thin films. This work lays a solid foundation in developing a holistic and reliable method to pattern graphene for use in high frequency electronics components.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves |
| 出版商 | IEEE Computer Society |
| ISBN（电子版） | 9781538682852 |
| DOI | |
| 出版状态 | 已出版 - 9月 2019 |
| 已对外发布 | 是 |
| 活动 | 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, 法国 期限: 1 9月 2019 → 6 9月 2019 |
出版系列
| 姓名 | International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz |
|---|---|
| 卷 | 2019-September |
| ISSN（印刷版） | 2162-2027 |
| ISSN（电子版） | 2162-2035 |
会议
| 会议 | 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 |
|---|---|
| 国家/地区 | 法国 |
| 市 | Paris |
| 时期 | 1/09/19 → 6/09/19 |
指纹
探究 'Graphene microfabrication for developing mm-wave and THz devices' 的科研主题。它们共同构成独一无二的指纹。引用此
Squires, A. D., Seo, D. H., Lam, S. K. H., Gao, X., Zhang, T., Han, Z. J., & Du, J. (2019). Graphene microfabrication for developing mm-wave and THz devices. 在 IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves 文章 8874502 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; 卷 2019-September). IEEE Computer Society. https://doi.org/10.1109/IRMMW-THz.2019.8874502