FPGA-based test equipment for system-level MEMS switch series

A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.