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Fizeau simultaneous phase-shifting interferometry based on extended source
Shanshan Wang
*
, Qiudong Zhu, Yinlong Hou, Zheng Cao
*
此作品的通讯作者
光电学院
Beijing Institute of Technology
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Engineering
Optical Path
100%
Experimental Platform
100%
Simulation Platform
100%
Granularity
100%
Reference Surface
100%
Interferometry
100%
Experimental Result
50%
Computer Simulation
50%
Simulation Result
50%
Imaging Systems
50%
Coherence Length
50%
Optical Systems
50%
Experimental Measurement
50%
Frequency Error
50%
Michelson Interferometer
50%
Matlab Code
50%
Physics
Optical Path
100%
Coherence
100%
Optical Phase Shifting Interferometry
100%
Interferometry
50%
Collimator
50%
Michelson Interferometer
50%