Fast lithographic source pupil optimization using difference of convex functions algorithm for transformed L1penalty

Yiyu Sun, Yanqiu Li*, Guanghui Liao, Miao Yuan, Yang Liu, Yaning Li, Lulu Zou, Lihui Liu

*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

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