Failure of a MEMS switch after environmental test

Ding Xuran; Feng Yue; Lou Wenzhong; Guo Yunlong

doi:10.1109/NEMS.2015.7147457

Failure of a MEMS switch after environmental test

Ding Xuran^*, Feng Yue, Lou Wenzhong, Guo Yunlong

^*此作品的通讯作者

机电学院

Beijing Institute of Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

4 引用（Scopus）

摘要

A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

源语言	英语
主期刊名	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
出版商	Institute of Electrical and Electronics Engineers Inc.
页	417-420
页数	4
ISBN（电子版）	9781467366953
DOI	https://doi.org/10.1109/NEMS.2015.7147457
出版状态	已出版 - 1 7月 2015
活动	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 - Xi'an, 中国期限: 7 4月 2015 → 11 4月 2015

出版系列

姓名	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

会议

会议	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
国家/地区	中国
市	Xi'an
时期	7/04/15 → 11/04/15

访问文件

10.1109/NEMS.2015.7147457

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引用此

Xuran, D., Yue, F., Wenzhong, L., & Yunlong, G. (2015). Failure of a MEMS switch after environmental test. 在 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 (页码 417-420). 文章 7147457 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2015.7147457

Xuran, Ding ; Yue, Feng ; Wenzhong, Lou 等. / Failure of a MEMS switch after environmental test. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 页码 417-420 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

@inproceedings{71758e27ab3943ccb8b5a847c210a4e7,

title = "Failure of a MEMS switch after environmental test",

abstract = "A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.",

keywords = "MEMS switch, environmental test, failure",

author = "Ding Xuran and Feng Yue and Lou Wenzhong and Guo Yunlong",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",

year = "2015",

month = jul,

day = "1",

doi = "10.1109/NEMS.2015.7147457",

language = "English",

series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "417--420",

booktitle = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

address = "United States",

}

Xuran, D, Yue, F, Wenzhong, L & Yunlong, G 2015, Failure of a MEMS switch after environmental test. 在 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015., 7147457, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Institute of Electrical and Electronics Engineers Inc., 页码 417-420, 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, 中国, 7/04/15. https://doi.org/10.1109/NEMS.2015.7147457

Failure of a MEMS switch after environmental test. / Xuran, Ding; Yue, Feng; Wenzhong, Lou 等.
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 页码 417-420 7147457 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Failure of a MEMS switch after environmental test

AU - Xuran, Ding

AU - Yue, Feng

AU - Wenzhong, Lou

AU - Yunlong, Guo

PY - 2015/7/1

Y1 - 2015/7/1

N2 - A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

AB - A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

KW - MEMS switch

KW - environmental test

KW - failure

UR - http://www.scopus.com/inward/record.url?scp=84939519268&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2015.7147457

DO - 10.1109/NEMS.2015.7147457

M3 - Conference contribution

AN - SCOPUS:84939519268

T3 - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

SP - 417

EP - 420

BT - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

Y2 - 7 April 2015 through 11 April 2015

ER -

Xuran D, Yue F, Wenzhong L, Yunlong G. Failure of a MEMS switch after environmental test. 在 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 页码 417-420. 7147457. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). doi: 10.1109/NEMS.2015.7147457

Failure of a MEMS switch after environmental test

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