@inproceedings{71758e27ab3943ccb8b5a847c210a4e7,
title = "Failure of a MEMS switch after environmental test",
abstract = "A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.",
keywords = "MEMS switch, environmental test, failure",
author = "Ding Xuran and Feng Yue and Lou Wenzhong and Guo Yunlong",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",
year = "2015",
month = jul,
day = "1",
doi = "10.1109/NEMS.2015.7147457",
language = "English",
series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "417--420",
booktitle = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",
address = "United States",
}