Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

Hongmei Liu; Quanliang Zhao; Chengjun Qiu; Maosheng Cao

doi:10.4028/0-87849-473-1.223

Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

Hongmei Liu^*, Quanliang Zhao, Chengjun Qiu, Maosheng Cao

^*此作品的通讯作者

材料学院

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm ², the remnant polarization of 30 μC/cm² and the coercive field of 50 kV/cm.

源语言	英语
页（从-至）	223-225
页数	3
期刊	Key Engineering Materials
卷	368-372 PART 1
DOI	https://doi.org/10.4028/0-87849-473-1.223
出版状态	已出版 - 2008

访问文件

10.4028/0-87849-473-1.223

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{1b72777c1541403486abbab66fa653fa,

title = "Fabrication of piezoelectric cantilever beam based on nanostructured PZT film",

abstract = "A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm 2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.",

keywords = "Cantilever beam, PZT, Sol-gel, Thick film",

author = "Hongmei Liu and Quanliang Zhao and Chengjun Qiu and Maosheng Cao",

year = "2008",

doi = "10.4028/0-87849-473-1.223",

language = "English",

volume = "368-372 PART 1",

pages = "223--225",

journal = "Key Engineering Materials",

issn = "1013-9826",

publisher = "Trans Tech Publications Ltd.",

}

TY - JOUR

T1 - Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

AU - Liu, Hongmei

AU - Zhao, Quanliang

AU - Qiu, Chengjun

AU - Cao, Maosheng

PY - 2008

Y1 - 2008

N2 - A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm 2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.

AB - A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm 2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.

KW - Cantilever beam

KW - PZT

KW - Sol-gel

KW - Thick film

UR - http://www.scopus.com/inward/record.url?scp=40949093100&partnerID=8YFLogxK

U2 - 10.4028/0-87849-473-1.223

DO - 10.4028/0-87849-473-1.223

M3 - Article

AN - SCOPUS:40949093100

SN - 1013-9826

VL - 368-372 PART 1

SP - 223

EP - 225

JO - Key Engineering Materials

JF - Key Engineering Materials

ER -

Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

摘要

访问文件

其它文件与链接

指纹

引用此