Fabrication of large-vector height aspheric microlens via tool swing stitching processing

Tianxing Wang, Tianfeng Zhou*, Jia Zhou, Benshuai Ruan, Wenxiang Zhao, Xibin Wang

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

Microlens elements are widely applied in various beam processing applications. However, due to the geometric limitations of the cutting tool and the degrees of freedom of the machine tool, the traditional cutting strategy cannot be employed to fabricate high quality large-vector height microlens. In this paper, a method based on the tool swing cutting and stitching processing is presented. The interference situation and the relationship between the tool parameters and microlens vector height are analyzed. The analysis shows that this method can improve the microlens vector height by about 2 times compared to the slow tool servo. Then the influence of tool setting error on stitching accuracy is studied, and an accurate tool setting method combining CCD tool setting and trial cutting is proposed. Finally, the microlens are experimentally machined to reveal that this method is possible to fabricate microlens with large-vector height and high surface quality.

源语言英语
主期刊名Seventh Asia Pacific Conference on Optics Manufacture, APCOM 2021
编辑Jiubin Tan, Xiangang Luo, Ming Huang, Lingbao Kong, Dawei Zhang
出版商SPIE
ISBN(电子版)9781510652088
DOI
出版状态已出版 - 2022
活动7th Asia Pacific Conference on Optics Manufacture, APCOM 2021 - Shanghai, 中国
期限: 28 10月 202131 10月 2021

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
12166
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议7th Asia Pacific Conference on Optics Manufacture, APCOM 2021
国家/地区中国
Shanghai
时期28/10/2131/10/21

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