摘要
A phase-shifting algorithm is proposed for evaluating the residual errors on the surface of optical components after magnetorheological finishing, which deduces the actual wavefront errors by calculating the relationship between sag errors and phase in view of spatial frequency. According to this model, a parabolic mirror was manufactured to a finally shape accuracy achieve to 20 nanometer within 20 millimeter aperture by optimizing the relative parameters such as tool path step, rotation speed of the polishing wheel and density of the magnetic field. Experimental results present that the model can overcome the limitation of traditional evaluating means, and provide powerful technical storage for studying magnetorheological finishing technology with nanometer accuracy thoroughly.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 917-919+1012 |
| 期刊 | Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology |
| 卷 | 38 |
| 期 | 6 |
| 出版状态 | 已出版 - 6月 2006 |