Erratum: Binary mask optimization for forward lithography based on boundary layer model in coherent systems (Journal of the Optical Society of America A: Optics and Image Science, and Vision (2009) 26 (1687-1692))

Xu Ma*, Gonzalo R. Arce

*此作品的通讯作者

科研成果: 期刊稿件评论/辩论

3 引用 (Scopus)
源语言英语
页(从-至)82-84
页数3
期刊Journal of the Optical Society of America A: Optics and Image Science, and Vision
27
1
DOI
出版状态已出版 - 1 1月 2010
已对外发布

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