Electrothermally actuated MEMS mirrors Design, modeling, and applications

Huikai Xie, Xiaoyang Zhang, Liang Zhou, Sagnik Pal

科研成果: 书/报告/会议事项章节 › 章节 › 同行评审

指纹

探究 'Electrothermally actuated MEMS mirrors Design, modeling, and applications' 的科研主题。它们共同构成独一无二的指纹。

Engineering