摘要
A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift. The actuators enable actuation of the waveguide over 56μm at only 1.2V from an initial displacement of 217μm. The measured resistance of the actuator pairs is 52μ, and the device consumes a maximum power of 75mW with all actuator pairs at peak power.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings |
| 页 | 109-110 |
| 页数 | 2 |
| DOI | |
| 出版状态 | 已出版 - 2013 |
| 已对外发布 | 是 |
| 活动 | 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, 日本 期限: 18 8月 2013 → 22 8月 2013 |
出版系列
| 姓名 | International Conference on Optical MEMS and Nanophotonics |
|---|---|
| ISSN（印刷版） | 2160-5033 |
| ISSN（电子版） | 2160-5041 |
会议
| 会议 | 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 |
|---|---|
| 国家/地区 | 日本 |
| 市 | Kanazawa |
| 时期 | 18/08/13 → 22/08/13 |
指纹
探究 'Electrothermally actuated large displacement waveguides' 的科研主题。它们共同构成独一无二的指纹。引用此
Samuelson, S. R., & Xie, H. (2013). Electrothermally actuated large displacement waveguides. 在 Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (页码 109-110). 文章 6659083 (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659083