EL红外缺陷测试仪关键参量校准方法研究

Ke Jia Zhang; Bi Feng Zhang; Li Min Xiong; Tao Geng Zhou; Jun Chao Zhang; Hai Feng Meng; Chuan Cai; Ying Wei He; Xiao Hui Li; Chang Shi Wang

doi:10.3969/j.issn.1000-1158.2018.02.22

EL红外缺陷测试仪关键参量校准方法研究

Ke Jia Zhang, Bi Feng Zhang, Li Min Xiong, Tao Geng Zhou, Jun Chao Zhang, Hai Feng Meng, Chuan Cai, Ying Wei He, Xiao Hui Li, Chang Shi Wang

光电学院

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用（Scopus）

摘要

Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.

投稿的翻译标题	Research on Calibration Method Key Parameters of EL Infrared Defect Tester
源语言	繁体中文
页（从-至）	246-250
页数	5
期刊	Jiliang Xuebao/Acta Metrologica Sinica
卷	39
期	2
DOI	https://doi.org/10.3969/j.issn.1000-1158.2018.02.22
出版状态	已出版 - 22 3月 2018

关键词

Calibration
EL infrared defect tester
Metrology
Resolution
SFR

访问文件

10.3969/j.issn.1000-1158.2018.02.22

其它文件与链接

链接到 Scopus 的出版物

引用此

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title = "EL红外缺陷测试仪关键参量校准方法研究",

abstract = "Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.",

keywords = "Calibration, EL infrared defect tester, Metrology, Resolution, SFR",

author = "Zhang, {Ke Jia} and Zhang, {Bi Feng} and Xiong, {Li Min} and Zhou, {Tao Geng} and Zhang, {Jun Chao} and Meng, {Hai Feng} and Chuan Cai and He, {Ying Wei} and Li, {Xiao Hui} and Wang, {Chang Shi}",

year = "2018",

month = mar,

day = "22",

doi = "10.3969/j.issn.1000-1158.2018.02.22",

language = "繁体中文",

volume = "39",

pages = "246--250",

journal = "Jiliang Xuebao/Acta Metrologica Sinica",

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TY - JOUR

T1 - EL红外缺陷测试仪关键参量校准方法研究

AU - Zhang, Ke Jia

AU - Zhang, Bi Feng

AU - Xiong, Li Min

AU - Zhou, Tao Geng

AU - Zhang, Jun Chao

AU - Meng, Hai Feng

AU - Cai, Chuan

AU - He, Ying Wei

AU - Li, Xiao Hui

AU - Wang, Chang Shi

PY - 2018/3/22

Y1 - 2018/3/22

N2 - Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.

AB - Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.

KW - Calibration

KW - EL infrared defect tester

KW - Metrology

KW - Resolution

KW - SFR

UR - http://www.scopus.com/inward/record.url?scp=85058485223&partnerID=8YFLogxK

U2 - 10.3969/j.issn.1000-1158.2018.02.22

DO - 10.3969/j.issn.1000-1158.2018.02.22

M3 - 文章

AN - SCOPUS:85058485223

SN - 1000-1158

VL - 39

SP - 246

EP - 250

JO - Jiliang Xuebao/Acta Metrologica Sinica

JF - Jiliang Xuebao/Acta Metrologica Sinica

IS - 2

ER -

EL红外缺陷测试仪关键参量校准方法研究

摘要

关键词

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