摘要
Characteristics of MgO films prepared by e-beam evaporation as a function of the annealing process are studied. The results show that, after the annealing process, the crystallinity of MgO films is improved, and the peak intensity in IR spectrum corresponding to water content is decreased. However, the visible transmission is decreased and cracks are easily produced on the surface for MgO films prepared at low temperature or low oxygen flux. The preferred orientation or the crystallinity plays an important role in controlling the visible spectrum and surface features of the deposited MgO films, and the visible spectrum is almost independent of the surface roughness of the films.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 63-67 |
| 页数 | 5 |
| 期刊 | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| 卷 | 26 |
| 期 | 1 |
| 出版状态 | 已出版 - 1月 2006 |