Effective multi-objective inverse lithography technology at full-field and full-chip levels with a hybrid dynamic priority algorithm

Pengzhi Wei, Yanqiu Li*, Zhaoxuan Li, Miao Yuan, Zen Li, Cheng Cheng Wang, Ang Li, Lei Qiao, He Yang

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

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Engineering

Chemical Engineering