@inproceedings{2fef24c9b5a34e5892d16bfe235fb3fc,
title = "Divided-aperture Dual-Differential Confocal Microscopy",
abstract = "We introduced a new method called divided-aperture dual-differential confocal microscopy (DADDCM), which delivered large sensing measurement range and high axial focusing capability for profile measurement. There are three virtual pinholes, one is on the optical axis and the other two are placed either side of the optical axis. The signal from each off-axis will be processed with the on-axis one, and the processed signals are added up to acquire the axial intensity response curve with large linear sensing range. So, it can realize the large-scale non-axial fast sensing scanning with an axial focusing capability of ~2 nm and an improved linear sensing range up to 2.1 times that of divided-aperture differential confocal microscopy (DADCM). Benefiting from this large linear sensing range, a non-axial scanning imaging detection of microstructures is implemented, which leads to a high scanning speed. This method provides a new high precision and fast measurement method for the three-dimensional morphology of microstructure.",
keywords = "Divided-aperture, Dual-differential, Image speed, Non-axial scanning",
author = "Rongji Li and Ruirui Zhang and Han Cui and Demin Xu and Han Ma and Lirong Qiu",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE. All rights reserved.; SPIE Future Sensing Technologies 2021 ; Conference date: 15-11-2021 Through 19-11-2021",
year = "2021",
doi = "10.1117/12.2621457",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Masafumi Kimata and Shaw, {Joseph A.} and Valenta, {Christopher R.}",
booktitle = "SPIE Future Sensing Technologies 2021",
address = "United States",
}
