Distributed and lumped element models for a bimorph-actuated micromirror

Engineering

• Applied Voltage 33%
• Circuit Model 66%
• Current Flow 33%
• Electric Lines 33%
• Electric Power Transmission 33%
• Element Model 100%
• Equivalent Circuit Model 33%
• Experimental Result 33%
• Finite Element Simulation 33%
• Heat Loss Coefficient 33%
• Length Scale 33%
• Micromirrors 100%
• Power Input 33%
• Rotation Angle 66%
• Thermal Model 33%
• Thermal Resistance 33%