Design and process of force-electric fusion for electromagnetic driven Si based MEMS S&A

Sining Lv, Hengzhen Feng, Wenzhong Lou, Chuan Xiao, Wenxing Kan, Wenting Su, Jinkui Wang, Tongan Ji

科研成果: 期刊稿件 › 会议文章 › 同行评审

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Engineering

Material Science