Design and microfabrication of an electrostatically actuated scanning micromirror with elevated electrodes

Mohd Haris*, Hongwei Qu, Ankur Jain, Huikai Xie

*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

指纹

探究 'Design and microfabrication of an electrostatically actuated scanning micromirror with elevated electrodes' 的科研主题。它们共同构成独一无二的指纹。

Engineering