TY - GEN
T1 - Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control
AU - Tseng, Victor Farm Guoo
AU - Li, Jiping
AU - Zhang, Xiaoyang
AU - Xie, Huikai
PY - 2013
Y1 - 2013
N2 - An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.
AB - An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.
UR - http://www.scopus.com/inward/record.url?scp=84892167593&partnerID=8YFLogxK
U2 - 10.1109/OMN.2013.6659062
DO - 10.1109/OMN.2013.6659062
M3 - Conference contribution
AN - SCOPUS:84892167593
SN - 9781479915125
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 67
EP - 68
BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
T2 - 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Y2 - 18 August 2013 through 22 August 2013
ER -