TY - GEN
T1 - Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans
AU - Liu, Lin
AU - Wang, Erkang
AU - Zhang, Xiaoyang
AU - Tang, Yiqi
AU - Xie, Huikai
PY - 2013
Y1 - 2013
N2 - A fiber-optic confocal microendoscope with MEMS scanners for both lateral and axial scan is presented. The MEMS 3D scan engine achieves a lateral scan range of over ± 26° with a 2D MEMS mirror and a depth scan of over 400 μm with a 1D MEMS tunable lens. Both 2D and 3D confocal images of micro-particles and acute rat brain tissue have been obtained.
AB - A fiber-optic confocal microendoscope with MEMS scanners for both lateral and axial scan is presented. The MEMS 3D scan engine achieves a lateral scan range of over ± 26° with a 2D MEMS mirror and a depth scan of over 400 μm with a 1D MEMS tunable lens. Both 2D and 3D confocal images of micro-particles and acute rat brain tissue have been obtained.
UR - http://www.scopus.com/inward/record.url?scp=84875480210&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2013.6474438
DO - 10.1109/MEMSYS.2013.6474438
M3 - Conference contribution
AN - SCOPUS:84875480210
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1085
EP - 1088
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -