Compressive sensing method for EUV source optimization using different bases

Jiaxin Lin, Lisong Dong, Taian Fan, Xu Ma, Rui Chen, Xiaoran Zhang, Hans Juergen Stock, Yayi Wei

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

指纹

探究 'Compressive sensing method for EUV source optimization using different bases' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Physics