Co-optimization method to reduce the pattern distortion caused by polarization aberration in anamorphic EUV lithography

Naiyuan Sheng, Yiyu Sun, Enze Li, Tie Li, Yanqiu Li*, Pengzhi Wei, Lihui Liu

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用 （Scopus）

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