CMOS z-axis capacitive accelerometer with comb-finger sensing

Huikai Xie; Gary K. Fedder

CMOS z-axis capacitive accelerometer with comb-finger sensing

Huikai Xie^*, Gary K. Fedder

^*此作品的通讯作者

Carnegie Mellon University

科研成果: 会议稿件 › 论文 › 同行评审

67 引用（Scopus）

摘要

This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27 g to 27 g.

源语言	英语
页	496-501
页数	6
出版状态	已出版 - 2000
已对外发布	是
活动	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn 期限: 23 1月 2000 → 27 1月 2000

会议

会议	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
市	Miyazaki, Jpn
时期	23/01/00 → 27/01/00

其它文件与链接

链接到 Scopus 的出版物

引用此

@conference{bde8034299114522b6f35b41df5b86f6,

title = "CMOS z-axis capacitive accelerometer with comb-finger sensing",

abstract = "This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27 g to 27 g.",

author = "Huikai Xie and Fedder, {Gary K.}",

year = "2000",

language = "English",

pages = "496--501",

note = "13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) ; Conference date: 23-01-2000 Through 27-01-2000",

}

TY - CONF

T1 - CMOS z-axis capacitive accelerometer with comb-finger sensing

AU - Xie, Huikai

AU - Fedder, Gary K.

PY - 2000

Y1 - 2000

N2 - This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27 g to 27 g.

AB - This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multi-conductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27 g to 27 g.

UR - http://www.scopus.com/inward/record.url?scp=0033708074&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0033708074

SP - 496

EP - 501

T2 - 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)

Y2 - 23 January 2000 through 27 January 2000

ER -

CMOS z-axis capacitive accelerometer with comb-finger sensing

摘要

会议

其它文件与链接

指纹

引用此