Atomic Simulations of Deformation Mechanism of 3C-SiC Polishing Process with a Rolling Abrasive

Zhihua Yin, Pengzhe Zhu*, Baozhen Li, Yimeng Xu, Rao Li

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

12 引用 (Scopus)

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Material Science

Engineering