Atomic-layer lithography of sub-10-nm plasmonic nanogaps on flat metallic surface

Dengxin Ji, Borui Chen, Xie Zeng, Tania Moein, Haomin Song, Nan Zhang, Qiaoqiang Gan, Alexander Cartwright

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

We developed a novel atomic layer lithography procedure to fabricate large area flat metallic surfaces with sub-10-nm features, which is particularly useful for fabrication of nanostructures with strongly localized field enhancement.

源语言英语
主期刊名Proceedings of Frontiers in Optics 2015, FIO 2015
出版商OSA - The Optical Society
ISBN(电子版)9781943580033
DOI
出版状态已出版 - 2015
已对外发布
活动Frontiers in Optics 2015, FIO 2015 - San Jose, 美国
期限: 18 10月 201522 10月 2015

出版系列

姓名Proceedings of Frontiers in Optics 2015, FIO 2015

会议

会议Frontiers in Optics 2015, FIO 2015
国家/地区美国
San Jose
时期18/10/1522/10/15

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