TY - JOUR
T1 - Angular distribution and recoil effect for 1 MeV Au+ ions through a Si3N4 thin foil
AU - Jin, Ke
AU - Zhu, Zihua
AU - Manandhar, Sandeep
AU - Liu, Jia
AU - Chen, Chien Hung
AU - Shutthanandan, Vaithiyalingam
AU - Thevuthasan, Suntharampillai
AU - Weber, William J.
AU - Zhang, Yanwen
PY - 2014/8/1
Y1 - 2014/8/1
N2 - The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ∼100 nm. The exiting Au ions are collected by a Si wafer located ∼14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si 3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N 4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ∼107 atoms/ion.
AB - The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ∼100 nm. The exiting Au ions are collected by a Si wafer located ∼14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si 3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N 4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ∼107 atoms/ion.
KW - Angular distribution
KW - Heavy ion
KW - SIMS
KW - Silicon nitride
KW - Stopping power
UR - http://www.scopus.com/inward/record.url?scp=84902548847&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2014.02.093
DO - 10.1016/j.nimb.2014.02.093
M3 - Article
AN - SCOPUS:84902548847
SN - 0168-583X
VL - 332
SP - 346
EP - 350
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ER -