Analysis of the failure and performance variation mechanism of MEMS suspended inductors with auxiliary pillars under high-g shock

Engineering

• Microelectromechanical System 100%
• Radio Frequency 100%
• Main Reason 66%
• Interlayer 33%
• Energy Dissipation 33%
• Critical Stress 33%
• Performance Parameter 33%
• Model Parameter 33%
• Integrated Circuit 33%
• Mechanical Performance 33%
• Gravitational Acceleration 33%

Material Science

• Microelectromechanical System 100%
• Electronic Circuit 33%
• Parameter Extraction 33%