@inproceedings{065899aa154b47ae84c27d44471ef5cf,
title = "An integrated optoelectronic position sensor for MEMS scanning mirrors",
abstract = "Piezoresistive strain gauges are usually used to measure position and displacement for MEMS scanning mirrors with torsional silicon bars, but this method cannot be applied to gimbal-less 2-axis electrothermal bimorph micromirrors since they do not have torsional silicon bars. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting angle of 2-axis electrothermally-actuated MEMS scanning mirrors. The iOE-PS integrates a laser diode and its driving circuits, a quadrant photo-detector (QPD) and its readout circuits, and a band-gap reference all on a single chip, and it has been fabricated in a standard 0.5μm CMOS process. Experimental results show that this optical sensor has a linear response when the distance between the MEMS mirror and the integrated sensor is from 4.0 mm to 4.9 mm and the tilting angle of the mirror plate scans from -1.5° to +1.5°.",
keywords = "Integrated optoelectronic position sensor, MEMS mirror, MOEMS, tilting angle",
author = "Xiang Cheng and Hangquan Lu and Zhuoge Lou and Huikai Xie and Wei Wang and Ming Zheng",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994508",
language = "English",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2179--2182",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
}
