Aluminum nitride-on-sapphire platform for integrated high-Q microresonators

Xianwen Liu, Changzheng Sun^*, Bing Xiong, Lai Wang, Jian Wang, Yanjun Han, Zhibiao Hao, Hongtao Li, Yi Luo, Jianchang Yan, Tongbo Wei, Yun Zhang, Junxi Wang

^*此作品的通讯作者