AlN micromechanical radial-contour disc resonator

Engineering

• Resonator 100%
• Radio Frequency 50%
• Piezoelectric 33%
• Resonance Mode 33%
• Communication System 16%
• Thin Films 16%
• Nitride 16%
• Finite Element Method 16%
• Transceiver 16%
• Silicon Wafer 16%
• Wireless Communication 16%
• Voltage Driving 16%
• Return Loss 16%
• Resonant Frequency 16%
• Network Analyzer 16%
• Resonance Frequency 16%
• Generation Device 16%

Material Science

• Resonator 100%
• Aluminum Nitride 100%
• Finite Element Method 16%
• Thin Films 16%
• Tungsten 16%
• Piezoelectricity 16%
• Titanium 16%
• Piezoelectric Property 16%
• Silicon Wafer 16%