TY - JOUR
T1 - A tunable microlens scanner with large-vertical-displacement actuation
AU - Jain, Ankur
AU - Xie, Huikai
PY - 2005
Y1 - 2005
N2 - We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.
AB - We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.
UR - http://www.scopus.com/inward/record.url?scp=26844559805&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:26844559805
SN - 1084-6999
SP - 92
EP - 95
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
M1 - MP10
T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
Y2 - 30 January 2005 through 3 February 2005
ER -