摘要
We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.
| 源语言 | 英语 |
|---|---|
| 文章编号 | MP10 |
| 页（从-至） | 92-95 |
| 页数 | 4 |
| 期刊 | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| 出版状态 | 已出版 - 2005 |
| 已对外发布 | 是 |
| 活动 | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, 美国 期限: 30 1月 2005 → 3 2月 2005 |
指纹
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Jain, A., & Xie, H. (2005). A tunable microlens scanner with large-vertical-displacement actuation. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 92-95. 文章 MP10.