A Robust Infrared Transducer beyond 2K ×2K Pixels

Defang Li; Jinying Zhang; Qingfeng Shi; Qifeng Li; Dongdong Zhao; Zhuo Li

doi:10.1109/MEMS51782.2021.9375413

A Robust Infrared Transducer beyond 2K ×2K Pixels

Defang Li, Jinying Zhang, Qingfeng Shi, Qifeng Li, Dongdong Zhao, Zhuo Li

光电学院

Beijing Institute of Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用（Scopus）

摘要

A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.

源语言	英语
主期刊名	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
出版商	Institute of Electrical and Electronics Engineers Inc.
页	923-926
页数	4
ISBN（电子版）	9781665419123
DOI	https://doi.org/10.1109/MEMS51782.2021.9375413
出版状态	已出版 - 25 1月 2021
活动	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, 美国期限: 25 1月 2021 → 29 1月 2021

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
卷	2021-January
ISSN（印刷版）	1084-6999

会议

会议	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
国家/地区	美国
市	Virtual, Gainesville
时期	25/01/21 → 29/01/21

访问文件

10.1109/MEMS51782.2021.9375413

其它文件与链接

链接到 Scopus 的出版物

引用此

Li, D., Zhang, J., Shi, Q., Li, Q., Zhao, D., & Li, Z. (2021). A Robust Infrared Transducer beyond 2K ×2K Pixels. 在 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (页码 923-926). 文章 9375413 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2021-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51782.2021.9375413

@inproceedings{bd7746a0faf64f41a2b122c3270a4567,

title = "A Robust Infrared Transducer beyond 2K ×2K Pixels",

abstract = "A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.",

keywords = "Infrared transducer, infrared image generation, silicon micro cavities, ultra-large scale array",

author = "Defang Li and Jinying Zhang and Qingfeng Shi and Qifeng Li and Dongdong Zhao and Zhuo Li",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",

year = "2021",

month = jan,

day = "25",

doi = "10.1109/MEMS51782.2021.9375413",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "923--926",

booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",

address = "United States",

}

Li, D, Zhang, J, Shi, Q, Li, Q, Zhao, D & Li, Z 2021, A Robust Infrared Transducer beyond 2K ×2K Pixels. 在 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375413, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 卷 2021-January, Institute of Electrical and Electronics Engineers Inc., 页码 923-926, 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, Virtual, Gainesville, 美国, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375413

A Robust Infrared Transducer beyond 2K ×2K Pixels. / Li, Defang; Zhang, Jinying; Shi, Qingfeng 等.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. 页码 923-926 9375413 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2021-January).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A Robust Infrared Transducer beyond 2K ×2K Pixels

AU - Li, Defang

AU - Zhang, Jinying

AU - Shi, Qingfeng

AU - Li, Qifeng

AU - Zhao, Dongdong

AU - Li, Zhuo

PY - 2021/1/25

Y1 - 2021/1/25

N2 - A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.

AB - A robust MEMS infrared thin film transducer beyond 2000 ×2000 pixels was proposed and fabricated for the first time. This novel transducer had excellent mechanical stability, time response and state-of-the-art pixel scale. The simulation and measured results of the transient temperature and radiation intensity were well consistent. High resolution infrared image was generated using the robust transducer. These results proved that the robust transducer is promising in infrared image generation of high frame rate, high resolution, and especially in large scale of pixels.

KW - Infrared transducer

KW - infrared image generation

KW - silicon micro cavities

KW - ultra-large scale array

UR - http://www.scopus.com/inward/record.url?scp=85103457716&partnerID=8YFLogxK

U2 - 10.1109/MEMS51782.2021.9375413

DO - 10.1109/MEMS51782.2021.9375413

M3 - Conference contribution

AN - SCOPUS:85103457716

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 923

EP - 926

BT - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021

Y2 - 25 January 2021 through 29 January 2021

ER -

Li D, Zhang J, Shi Q, Li Q, Zhao D, Li Z. A Robust Infrared Transducer beyond 2K ×2K Pixels. 在 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. 页码 923-926. 9375413. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375413

A Robust Infrared Transducer beyond 2K ×2K Pixels

摘要

出版系列

会议

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