@inproceedings{d1f586ee3aa648daafc5771417f4f5c2,
title = "A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten",
abstract = "This paper reports a fast, robust electrothermal bimorph micromirror with a symmetric inverse-series-connected bimorph actuator. The actuator is made up of symmetric Cu-W bimorphs with high sensitivity and fast thermal response. A unique backside DRIE release process is developed to keep the mirror surface intact during release. The micromirror is able to perform both piston and tip-tilt motion. A maximum piston displacement of 169 μm is achieved with lateral shift less than 1.5 μm at the driving voltage of only 2.3 V. The maximum optical angle achieved is ±13° at 2.3 V. This mirror gives fast thermal response of less than 7.5 ms. The resonances of the piston and tip-tilt modes are 1.58 kHz and 2.74 kHz, respectively.",
keywords = "MEMS mirror, electrothermal actuation, inverse-series-connected, symmetric bimorph",
author = "Xiaoyang Zhang and Boxiao Li and Xingde Li and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181072",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "912--915",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
address = "United States",
}