A novel surface polishing method and its fundamental performance in ultra-fine polishing of wafer

Jianguo Cao, Jianyong Li*, Meng Nie, Pengzhe Zhu, Chaoyue Zhao, Jingjing Zhang, Tong Xuan, Jinhuan Xu, Baozhen Li

*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

19 引用 （Scopus）

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Engineering