A novel design and fabrication of V type valve microactuator with PZT prepared by sol-gel

Engineering

• Thin Films 100%
• Piezoelectric 100%
• Silicon Substrate 100%
• Layer Design 50%
• Scanning Electron Microscope 50%
• Anisotropic 50%
• X-Ray Diffraction Analysis 50%
• Multilayer Film 50%
• Etching Process 50%
• Film Preparation 50%

Material Science

• Anisotropic Etching 25%