A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Xiaoyang Zhang; Can Duan; Lin Liu; Xingde Li; Huikai Xie

doi:10.1016/j.sna.2015.07.001

A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Xiaoyang Zhang^*, Can Duan, Lin Liu, Xingde Li, Huikai Xie

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22 引用（Scopus）

摘要

Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

源语言	英语
文章编号	9232
页（从-至）	239-245
页数	7
期刊	Sensors and Actuators A: Physical
卷	233
DOI	https://doi.org/10.1016/j.sna.2015.07.001
出版状态	已出版 - 3 8月 2015
已对外发布	是

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@article{ad4662a8d3c94337aff0ab9af56aa5e2,

title = "A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage",

abstract = "Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.",

keywords = "Distal fiber scanning, Electrothermal actuation, Fiber scanner, Large range, MEMS stage, Micro-platform, Microactuator",

author = "Xiaoyang Zhang and Can Duan and Lin Liu and Xingde Li and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2015 Elsevier B.V.",

year = "2015",

month = aug,

day = "3",

doi = "10.1016/j.sna.2015.07.001",

language = "English",

volume = "233",

pages = "239--245",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

AU - Zhang, Xiaoyang

AU - Duan, Can

AU - Liu, Lin

AU - Li, Xingde

AU - Xie, Huikai

PY - 2015/8/3

Y1 - 2015/8/3

N2 - Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

AB - Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

KW - Distal fiber scanning

KW - Electrothermal actuation

KW - Fiber scanner

KW - Large range

KW - MEMS stage

KW - Micro-platform

KW - Microactuator

UR - http://www.scopus.com/inward/record.url?scp=84938226244&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2015.07.001

DO - 10.1016/j.sna.2015.07.001

M3 - Article

AN - SCOPUS:84938226244

SN - 0924-4247

VL - 233

SP - 239

EP - 245

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

M1 - 9232

ER -

A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

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