@inproceedings{e91715512bca42b5a1b4d9f08e9ffa15,
title = "A new method used for measuring the parameter of elastic thin-neck based on CCD aiming",
abstract = "A new method used in measuring the parameter of elastic thin-neck is presented because of the shortage in measuring these parameter on old methods. The method utilizes high precision CCD to aim, high precision raster to measure, rotate the work-platform to acquire the parameter of the elastic thin-neck. The technology of using CCD to aim is applied in the method, and the method is belonged to non-contacted method, as a result to avoid the micro-distortion formed by the micro measuring force. The method can take full advantage of information received by CCD, and have high precision. The experimental result shows that the uncertainty of this method can be up to 0.3μm.",
keywords = "Auto-focus, Elastic thin-neck, Encoder, Location in subpixel",
author = "Jiwen Cui and Lirong Qiu and Guoliang Jin and Jiubin Tan",
year = "2002",
language = "English",
isbn = "7560317685",
series = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
pages = "2/799--2/803",
editor = "T. Jiubin and W. Xianfang and T. Jiubin and W. Xianfang",
booktitle = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
note = "Proceedings of the second International Symposium on Instrumentation Science and Technology ; Conference date: 18-08-2002 Through 22-08-2002",
}