A new calibration method of systematic errors in phase-shifting point diffraction interferometer

Ke Liu*, Yanqiu Li

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

11 引用 (Scopus)

摘要

Because the phase-shifting point diffraction interferometer (PS/PDI) uses lateral shearing of test and reference waves to generate carrier frequency fringe pattern, significant systematic measurement errors are consequentialty introduced. A new calibration method of PS/PDI systematic errors, named rotating grating method, is proposed. Based on the PS/PDI measurement results obtained with two gratings in orthogonal directions, the proposed method utilizes the orthogonal and symmetric property of Zernike polynomials in unit circle to calibrate the systematic errors of PS/PDI. The calibration experiment of visible light PS/PDI is performed to verify the method. The result shows that the geometric coma of the system is -0.116λ which is consistent with the theoretical value of -0.133λ, which proves the validity of the method.

源语言英语
页(从-至)2923-2927
页数5
期刊Guangxue Xuebao/Acta Optica Sinica
30
10
DOI
出版状态已出版 - 10月 2010

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Liu, K., & Li, Y. (2010). A new calibration method of systematic errors in phase-shifting point diffraction interferometer. Guangxue Xuebao/Acta Optica Sinica, 30(10), 2923-2927. https://doi.org/10.3788/AOS20103010.2923