TY - JOUR
T1 - A new calibration method of systematic errors in phase-shifting point diffraction interferometer
AU - Liu, Ke
AU - Li, Yanqiu
PY - 2010/10
Y1 - 2010/10
N2 - Because the phase-shifting point diffraction interferometer (PS/PDI) uses lateral shearing of test and reference waves to generate carrier frequency fringe pattern, significant systematic measurement errors are consequentialty introduced. A new calibration method of PS/PDI systematic errors, named rotating grating method, is proposed. Based on the PS/PDI measurement results obtained with two gratings in orthogonal directions, the proposed method utilizes the orthogonal and symmetric property of Zernike polynomials in unit circle to calibrate the systematic errors of PS/PDI. The calibration experiment of visible light PS/PDI is performed to verify the method. The result shows that the geometric coma of the system is -0.116λ which is consistent with the theoretical value of -0.133λ, which proves the validity of the method.
AB - Because the phase-shifting point diffraction interferometer (PS/PDI) uses lateral shearing of test and reference waves to generate carrier frequency fringe pattern, significant systematic measurement errors are consequentialty introduced. A new calibration method of PS/PDI systematic errors, named rotating grating method, is proposed. Based on the PS/PDI measurement results obtained with two gratings in orthogonal directions, the proposed method utilizes the orthogonal and symmetric property of Zernike polynomials in unit circle to calibrate the systematic errors of PS/PDI. The calibration experiment of visible light PS/PDI is performed to verify the method. The result shows that the geometric coma of the system is -0.116λ which is consistent with the theoretical value of -0.133λ, which proves the validity of the method.
KW - Lithography
KW - Optical measurement
KW - Phase-shifting interferometry
KW - Point diffraction interferometer
KW - Systematic error calibration
UR - http://www.scopus.com/inward/record.url?scp=78149396539&partnerID=8YFLogxK
U2 - 10.3788/AOS20103010.2923
DO - 10.3788/AOS20103010.2923
M3 - Article
AN - SCOPUS:78149396539
SN - 0253-2239
VL - 30
SP - 2923
EP - 2927
JO - Guangxue Xuebao/Acta Optica Sinica
JF - Guangxue Xuebao/Acta Optica Sinica
IS - 10
ER -