TY - GEN
T1 - A multi-channel test system for calibration of MEMS barometric pressure sensors
AU - Lou, Wenzhong
AU - Xuran, Ding
AU - Hong, Rongsen
PY - 2013
Y1 - 2013
N2 - For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.
AB - For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.
KW - Radiosondes
KW - calibration of MEMS sensors
KW - multi-channel
KW - test system
UR - http://www.scopus.com/inward/record.url?scp=84883079184&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2013.6559782
DO - 10.1109/NEMS.2013.6559782
M3 - Conference contribution
AN - SCOPUS:84883079184
SN - 9781467363525
T3 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
SP - 516
EP - 519
BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
T2 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Y2 - 7 April 2013 through 10 April 2013
ER -