A method for compensating the polarization aberration of projection optics in immersion lithography

Yue Jia, Yanqiu Li*, Lihui Liu, Chunying Han, Xiaolin Liu

*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

6 引用 （Scopus）

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